Shafi na evaporation: Ta hanyar dumama da fitar da wani abu don saka shi a kan daskararru, ana kiran shi shafe-shafe.M. Faraday ne ya fara samar da wannan hanyar a cikin 1857, kuma ta zama ɗaya daga cikin
dabarun shafa da aka saba amfani da su a wannan zamani.Ana nuna tsarin kayan aikin shafewa a cikin hoto 1.
Abubuwan da aka fitar da su kamar karafa, mahadi, da sauransu ana sanya su a cikin crucible ko kuma rataye su a kan waya mai zafi kamar yadda tushen evaporation, kuma kayan aikin da za a yi amfani da su, kamar karfe, yumbu, filastik da sauran abubuwan, ana sanya su a gaba. crucible.Bayan an fitar da tsarin zuwa wani babban wuri, ana yin zafi da crucible don ƙafe abubuwan da ke ciki.Atoms ko kwayoyin halitta na abin da aka ƙafe ana jibge su a saman ƙasan ta hanyar daɗaɗɗa.Kaurin fim ɗin na iya zuwa daga ɗaruruwan angstroms zuwa microns da yawa.An ƙaddara kauri daga cikin fim ɗin ta hanyar ƙimar ƙawancen da lokaci na tushen evaporation (ko adadin lodawa), kuma yana da alaƙa da nisa tsakanin tushen da substrate.Don manyan suturar yanki, ana amfani da juzu'i mai jujjuyawa ko maɓuɓɓuka masu yawa don tabbatar da daidaiton kauri na fim.Nisa daga tushen ƙafewa zuwa ƙasa ya kamata ya zama ƙasa da ma'anar free hanyar ƙwayoyin tururi a cikin ragowar iskar gas don hana karon ƙwayoyin tururi tare da ragowar ƙwayoyin iskar gas daga haifar da tasirin sinadarai.Matsakaicin makamashin motsi na ƙwayoyin tururi ya kai kusan 0.1 zuwa 0.2 volts na lantarki.
Akwai nau'ikan maɓuɓɓugar ruwa iri uku.
①Madogarar dumama juriya: Yi amfani da ƙarfe na ƙarfe kamar tungsten da tantalum don yin foil ɗin jirgin ruwa ko filament, da amfani da wutar lantarki don dumama ƙawancen da ke sama da shi ko a cikin crucible (Hoto 1 [Schematic diagram of evaporation shafi kayan aiki] injin rufewa) Resistance dumama Ana amfani da tushen galibi don ƙafe kayan kamar Cd, Pb, Ag, Al, Cu, Cr, Au, Ni;
② Madogarar dumama shigar da maɗaukakiyar mitoci: yi amfani da na'urar shigar da wutar lantarki mai ƙarfi don ɗora kayan da ake iya ɗaurewa da ƙafewa;
③Electron biam dumama tushen: m Ga kayan da mafi girma evaporation zafin jiki (ba kasa da 2000 [618-1]), da kayan da aka tururi ta hanyar bombarding kayan da electron biam.
Idan aka kwatanta da sauran hanyoyin rufewa, shafe-shafe mai fitar da ruwa yana da ƙimar ajiya mafi girma, kuma ana iya shafa shi da fina-finai na firamare da waɗanda ba su da zafi ba.
Domin saka babban fim ɗin kristal guda ɗaya mai tsafta, ana iya amfani da epitaxy na ƙwayoyin ƙwayoyin cuta.Na'urar epitaxy na kwayoyin halitta don girma gaAlAs Layer crystal Layer an nuna shi a cikin Hoto 2.Tanderun jet an sanye shi da tushen katako na kwayoyin halitta.Lokacin da aka yi zafi zuwa wani zafin jiki a ƙarƙashin matsananciyar matsananciyar zafi, abubuwan da ke cikin tanderun ana fitar da su zuwa ma'auni a cikin rafi mai kama da katako.The substrate yana mai tsanani zuwa wani zafin jiki, kwayoyin da aka ajiye a kan substrate na iya yin hijira, kuma lu'ulu'u suna girma a cikin tsari na substrate crystal lattice.Za a iya amfani da epitaxy na molecular bim
sami fim ɗin kristal guda ɗaya mai tsafta mai ƙarfi tare da rabon stoichiometric da ake buƙata.Fim ɗin yana girma a hankali Ana iya sarrafa gudun a 1 Layer / sec.Ta hanyar sarrafa baffle, fim ɗin kristal guda ɗaya tare da abubuwan da ake buƙata da tsarin da ake buƙata za a iya yin daidai.Ana amfani da epitaxy na ƙwayar ƙwayar ƙwayar cuta don kera na'urorin haɗaɗɗen gani daban-daban da kuma fina-finai na tsarin superlatice daban-daban.
Lokacin aikawa: Yuli-31-2021