Rufewa Lokacin da barbashi masu ƙarfi suka yi bama-bamai akan ƙaƙƙarfan farfajiyar, barbashin da ke kan ƙaƙƙarfan farfajiyar na iya samun kuzari da tserewa saman da za a jibge shi akan ƙasa.An fara amfani da al'amarin sputtering a cikin fasahar shafa a cikin 1870, kuma a hankali ana amfani da shi wajen samar da masana'antu bayan 1930 saboda karuwar adadin kuɗi.Ana nuna kayan aikin sputter na sandar sanda da aka saba amfani da su a cikin Hoto na 3.Yawancin lokaci ana yin kayan da za a ajiye a cikin farantin karfe-manufa, wanda aka gyara akan cathode.Ana sanya substrate a kan anode yana fuskantar farfajiyar manufa, ƴan santimita kaɗan daga manufa.Bayan da tsarin da aka famfo zuwa wani babban vacuum, an cika shi da 10 ~ 1 Pa gas (yawanci argon), kuma ana amfani da ƙarfin lantarki na dubban volts tsakanin cathode da anode, kuma ana haifar da fitarwa mai haske tsakanin electrodes biyu. .Ingantattun ions da fitarwa ke haifarwa suna tashi zuwa cathode a ƙarƙashin aikin wutar lantarki kuma suna yin karo da atom ɗin akan saman da ake nufi.Atom ɗin da aka yi niyya waɗanda ke tserewa daga saman da aka yi niyya saboda karon ana kiran su atoms sputtering, kuma makamashin su yana cikin kewayon 1 zuwa dubun wutar lantarki.Ana ajiye atom ɗin da aka watsar a saman ƙasa don samar da fim.Ba kamar shafin evaporation ba, suturar sputter ba ta iyakance ta wurin narkewar kayan fim ɗin ba, kuma yana iya sputter abubuwan da ba su da ƙarfi kamar W, Ta, C, Mo, WC, TiC, da dai sauransu. Za a iya sputtering fili fili fim ɗin ta hanyar reactive sputtering. hanya, wato, iskar gas mai amsawa (O, N, HS, CH, da sauransu).
da aka kara da iskar Ar, kuma iskar gas mai amsawa da ions suna amsawa tare da atom ɗin da aka yi niyya ko atom ɗin da aka watsa don samar da mahadi (kamar oxide, nitrogen) Compounds, da sauransu) kuma a ajiye su a kan ƙasa.Ana iya amfani da hanyar sputter mai girma don saka fim ɗin da ke rufewa.An ɗora maƙallan a kan na'urar lantarki mai ƙasa, kuma an ɗora makasudin insulating akan kishiyar lantarki.Ƙarshen wutar lantarki mai yawan mitoci yana ƙasa, kuma ƙarshen ɗaya yana haɗe da na'urar lantarki sanye take da abin rufe fuska ta hanyar hanyar sadarwa da ta dace da kuma capacitor na DC.Bayan kunna wutar lantarki mai ƙarfi, ƙarfin wutar lantarki yana ci gaba da canza polarity.Electrons da ingantattun ions a cikin plasma sun buge maƙasudin insulating yayin ingantaccen zagayowar rabin zagayowar da mummunan rabin zagayowar wutar lantarki, bi da bi.Tunda motsin lantarki ya fi na ions masu kyau, an caje saman abin da ake saƙawa.Lokacin da aka kai ma'aunin ma'auni mai ƙarfi, abin da ake so ya kasance a cikin mummunan ra'ayi, ta yadda kyawawan ions masu yadawa akan manufa su ci gaba.Yin amfani da sputtering magnetron na iya ƙara yawan ajiyar kuɗi ta kusan tsari na girma idan aka kwatanta da wanda ba na magnetron ba.
Lokacin aikawa: Yuli-31-2021